We propose spectral domain attenuated reflectometry (SDAR) for fast characterization of nanomaterial growth. The method is demonstrated here for zinc oxide (ZnO) nanowires (NWs) which are grown vertically in random forest fashion showing that it is not limited to well-ordered NWs. We show how SDAR can provide, on the basis of a single measured spectrum, simultaneous information on nanowire length, nanowire density (through nanowire/air filling ratio), and crystalline quality (through band gap). The robustness of the proposed method is assessed first through comparison with information obtained from SEM and XRD taken as reference. In SDAR, the process for fast extraction of NW thickness and filling ratio values makes use of the interference pattern contrast and the spectral periodicity in the reflection response which involve a best fit of the measured spectra with simple theoretical modeling based on the effective medium approach, achieved with a mean square error down to 0.1%. The results also suggest the existence of either 2 or 3 layers of different effective refractive index, hence providing insight on possible growth mechanisms.
Keywords: Fabry−Perot interferometer; Optical metrology; UV−vis−NIR spectroscopy; effective index method; in situ measurement; nanostructure; zinc oxide.