Advances in Capacitive Micromachined Ultrasonic Transducers

Kevin Brenner; Arif Sanli Ergun; Kamyar Firouzi; Morten Fischer Rasmussen; Quintin Stedman; Butrus Pierre Khuri-Yakub

doi:10.3390/mi10020152

Advances in Capacitive Micromachined Ultrasonic Transducers

Micromachines (Basel). 2019 Feb 23;10(2):152. doi: 10.3390/mi10020152.

Authors

Kevin Brenner¹, Arif Sanli Ergun^{2

3}, Kamyar Firouzi⁴, Morten Fischer Rasmussen⁵, Quintin Stedman⁶, Butrus Pierre Khuri-Yakub⁷

Affiliations

¹ E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. brennerk@stanford.edu.
² E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. sanli.ergun@gmail.com.
³ Faculty of Engineering, TOBB University of Economics and Technology, Ankara 06560, Turkey. sanli.ergun@gmail.com.
⁴ E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. kfirouzi@stanford.edu.
⁵ E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. mofi@stanford.edu.
⁶ E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. qstedman@stanford.edu.
⁷ E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. pierreky@stanford.edu.

Abstract

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

Keywords: acoustics; capacitive; capacitive micromachined ultrasonic transducer (CMUT); fabrication; micromachining; modelling; transducer.

Publication types

Review

Grants and funding

1R01EB023901/National Institutes of Health