This review focuses on self-cleaning surfaces, from passive bio-inspired surface modification including superhydrophobic, superomniphobic, and superhydrophilic surfaces, to active micro-electro-mechanical systems (MEMS) and digital microfluidic systems. We describe models and designs for nature-inspired self-cleaning schemes as well as novel engineering approaches, and we discuss examples of how MEMS/microfluidic systems integrate with functional surfaces to dislodge dust or undesired liquid residues. Meanwhile, we also examine "waterless" surface cleaning systems including electrodynamic screens and gecko seta-inspired tapes. The paper summarizes the state of the art in self-cleaning surfaces, introduces available cleaning mechanisms, describes established fabrication processes and provides practical application examples.
Keywords: electrodynamic screen; gecko setae; microfluidics; self-cleaning surface; superhydrophilic; superhydrophobic; superomniphobic.