Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications

Eun-Seong Kim; Jun-Ge Liang; Cong Wang; Myung-Yeon Cho; Jong-Min Oh; Nam-Young Kim

doi:10.1038/s41598-018-37416-7

Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications

Sci Rep. 2019 Jan 24;9(1):680. doi: 10.1038/s41598-018-37416-7.

Authors

Eun-Seong Kim¹, Jun-Ge Liang¹, Cong Wang^{2

3}, Myung-Yeon Cho^{1

4}, Jong-Min Oh^{5

6}, Nam-Young Kim⁷

Affiliations

¹ RFIC Center, Kwangwoon University, Seoul, 139-701, Republic of Korea.
² RFIC Center, Kwangwoon University, Seoul, 139-701, Republic of Korea. kevinwang@hit.edu.cn.
³ School of Electronics and Information Engineering, Harbin Institute of Technology, Harbin, 150001, China. kevinwang@hit.edu.cn.
⁴ Department of Electronic Materials Engineering, Kwangwoon University, Seoul, 139-701, Republic of Korea.
⁵ RFIC Center, Kwangwoon University, Seoul, 139-701, Republic of Korea. jmOH@kw.ac.kr.
⁶ Department of Electronic Materials Engineering, Kwangwoon University, Seoul, 139-701, Republic of Korea. jmOH@kw.ac.kr.
⁷ RFIC Center, Kwangwoon University, Seoul, 139-701, Republic of Korea. nykim@kw.ac.kr.

Abstract

Inter-digital capacitors (IDCs) with aerosol-deposition (AD) high-k dielectric layer were compared via simulation and measurements of bare IDCs and AD IDCs at room temperature and subjected to a post-annealing process for realizing capacitive super-sensing applications. IDCs with thin AD films can provide higher capacitive intensity and improvements for other dielectric performances. Therefore, IDC patterns with AD high-k dielectric layers were fabricated by varying the finger widths and gap. Moreover, we analyzed the layer microstructure design patterns using simulations and experiments with AD BaTiO₃ as-deposited IDCs and IDCs subjected to annealing at 500 °C. These three different IDCs were measured using an impedance analyzer; furthermore, the AD BaTiO₃ films were evaluated using X-ray diffraction, atomic force microscopy, and traveling electron microscopy. The results for the IDCs with the AD BaTiO₃ film show the highest capacitance when compared with other thin layer capacitors, which is expected to be useful in realizing super-sensing applications in the future.