Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

N Jaber; M A A Hafiz; S N R Kazmi; M H Hasan; F Alsaleem; S Ilyas; M I Younis

doi:10.1038/s41598-018-36482-1

Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

Sci Rep. 2019 Jan 22;9(1):319. doi: 10.1038/s41598-018-36482-1.

Authors

N Jaber¹, M A A Hafiz¹, S N R Kazmi¹, M H Hasan², F Alsaleem², S Ilyas¹, M I Younis³

Affiliations

¹ Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia.
² Durham School of Architectural Engineering and Construction, University of Nebraska Lincoln, Lincoln, Nebraska, 68182-0816, USA.
³ Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia. Mohammad.Younis@kaust.edu.sa.

Abstract

We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.