High-precision grating period measurement

Appl Opt. 2019 Jan 10;58(2):270-273. doi: 10.1364/AO.58.000270.

Abstract

We introduce a method for measuring a periodic structure, particularly a grating period. The method is based on the high-precision laser Talbot effect. The combination of a rubidium-locked external cavity diode laser and the Talbot interferometer provides an excellent and simple tool for this purpose. Some experimental results are provided to demonstrate the approach.