Implementation of a CMOS/MEMS Accelerometer with ASIC Processes

Yu-Sian Liu; Kuei-Ann Wen

doi:10.3390/mi10010050

Implementation of a CMOS/MEMS Accelerometer with ASIC Processes

Micromachines (Basel). 2019 Jan 12;10(1):50. doi: 10.3390/mi10010050.

Authors

Yu-Sian Liu¹, Kuei-Ann Wen²

Affiliations

¹ Institute of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan. thomas.ee02g@nctu.edu.tw.
² Institute of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan. stellawen@mail.nctu.edu.tw.

Abstract

This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS process. An approximate analytical model for the spring design is presented. The experiments showed that the resonant frequency of the proposed tri-axis accelerometer was around 5.35 kHz for out-plane vibration. The tri-axis accelerometer had an area of 1096 μm × 1256 μm.

Keywords: accelerometer design; analytical model; spring design.