Structure Retrieval at Atomic Resolution in the Presence of Multiple Scattering of the Electron Probe

H G Brown; Z Chen; M Weyland; C Ophus; J Ciston; L J Allen; S D Findlay

doi:10.1103/PhysRevLett.121.266102

Structure Retrieval at Atomic Resolution in the Presence of Multiple Scattering of the Electron Probe

Phys Rev Lett. 2018 Dec 28;121(26):266102. doi: 10.1103/PhysRevLett.121.266102.

Authors

H G Brown¹, Z Chen¹, M Weyland^{2

3}, C Ophus⁴, J Ciston⁴, L J Allen^{5

6}, S D Findlay¹

Affiliations

¹ School of Physics and Astronomy, Monash University, Victoria 3800, Australia.
² Monash Centre for Electron Microscopy, Monash University, Clayton, Victoria 3800, Australia.
³ Department of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, Australia.
⁴ National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
⁵ School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia.
⁶ Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany.

PMID: 30636159
DOI: 10.1103/PhysRevLett.121.266102

Abstract

The projected electrostatic potential of a thick crystal is reconstructed at atomic resolution from experimental scanning transmission electron microscopy data recorded using a new generation fast-readout electron camera. This practical and deterministic inversion of the equations encapsulating multiple scattering that were written down by Bethe in 1928 removes the restriction of established methods to ultrathin (≲50 Å) samples. Instruments already coming on line can overcome the remaining resolution-limiting effects in this method due to finite probe-forming aperture size, spatial incoherence, and residual lens aberrations.