The impact of area on BAW resonator performance and an approach to device miniaturization

Ngoc Nguyen; Agne Johannessen; Stig Rooth; Ulrik Hanke

doi:10.1016/j.ultras.2018.11.014

The impact of area on BAW resonator performance and an approach to device miniaturization

Ultrasonics. 2019 Apr:94:92-101. doi: 10.1016/j.ultras.2018.11.014. Epub 2018 Dec 14.

Authors

Ngoc Nguyen¹, Agne Johannessen¹, Stig Rooth², Ulrik Hanke³

Affiliations

¹ Department of Microsystems, University of South-Eastern Norway, Raveien 215, 3184 Borre, Norway.
² Kongsberg Norspace AS, Knudsrødveien 7, 3189 Horten, Norway.
³ Department of Microsystems, University of South-Eastern Norway, Raveien 215, 3184 Borre, Norway. Electronic address: ulrik.hanke@usn.no.

PMID: 30595389
DOI: 10.1016/j.ultras.2018.11.014

Abstract

The dependence of the performance of thin film bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR), on their areas is studied with the aid of finite element method (FEM) software. Dual step frame method is applied for both types of the resonators in order to improve their quality factors at resonance and at antiresonance frequency when they are miniaturized. The important role of the material quality in promoting the benefit of this method is also emphasized in this study.

Keywords: BAW resonator filters; FBAR; SMR.