We have fabricated a temperature-sensitive hydrogel through copolymerization of N-isopropylacrylamide (NIPAAm) and Acrylamide (AAm) inside a macroporous silicon structure and demonstrated fast thermal response compared to its bulk structure. The presented method allows physical arrangement of micro-sized hydrogels within a predefined arrayed structure. Static and dynamic temperature responses of the fabricated structure are successfully demonstrated through optical transmission measurement. The measured temporal response reveals that presented structure can allow fast response time of the implemented hydrogels. Furthermore, spatial thermo-distribution pattern can be observed through pixel-like, arrayed macropores, which indicates a potential for addressing individual or single-channel hydrogel sensors or actuators through temperature stimulation.
Keywords: Hydrogel-based sensors and actuators; Macroporous Silicon; Optical sensor; Temperature Sensor.