A new spatially coherent beamline has been designed and constructed at the Shanghai Synchrotron Radiation Facility. Here, the design of the beamline is introduced and the spatial coherence is analyzed throughout the whole process by wave optics. The simulation results show good spatial coherence at the endstation and have been proven by experiment results.
Keywords: mutual optical intensity; soft X-ray interference lithography beamline; spatial coherence; synchrotron radiation; wave optics.