3D Multi-Microchannel Helical Mixer Fabricated by Femtosecond Laser inside Fused Silica

Chao Shan; Feng Chen; Qing Yang; Zhuangde Jiang; Xun Hou

doi:10.3390/mi9010029

3D Multi-Microchannel Helical Mixer Fabricated by Femtosecond Laser inside Fused Silica

Micromachines (Basel). 2018 Jan 16;9(1):29. doi: 10.3390/mi9010029.

Authors

Chao Shan^{1

2}, Feng Chen^{3

4}, Qing Yang^{5

6}, Zhuangde Jiang^{7

8}, Xun Hou⁹

Affiliations

¹ State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shanxi Province, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China. shanchaobest@stu.xjtu.edu.cn.
² The International Joint Research Center for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China. shanchaobest@stu.xjtu.edu.cn.
³ State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shanxi Province, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China. chenfeng@mail.xjtu.edu.cn.
⁴ The International Joint Research Center for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China. chenfeng@mail.xjtu.edu.cn.
⁵ The International Joint Research Center for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China. yangqing@mail.xjtu.edu.cn.
⁶ School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China. yangqing@mail.xjtu.edu.cn.
⁷ The International Joint Research Center for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China. zdjiang@mail.xjtu.edu.cn.
⁸ School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China. zdjiang@mail.xjtu.edu.cn.
⁹ State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shanxi Province, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China. houxun@mail.xjtu.edu.cn.

Abstract

Three-dimensional (3D) multi-microchannel mixers can meet the requirements of different combinations according to actual needs. Rapid and simple creation of 3D multi-microchannel mixers in a "lab-on-a-chip" platform is a significant challenge in micromachining. In order to realize the complex mixing functions of microfluidic chips, we fabricated two kinds of complex structure micromixers for multiple substance mixes simultaneously, separately, and in proper order. The 3D multi-microchannel mixers are fabricated by femtosecond laser wet etch technology inside fused silica. The 3D multi-microchannel helical mixers have desirable uniformity and consistency, which will greatly expand their utility and scope of application.

Keywords: femtosecond laser; microstructure fabrication; passive micromixer.

Abstract

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