A new precise positioning method for piezoelectric scanner of AFM

Yanyan Wang; Sen Wu; Linyan Xu; Yanan Zeng

doi:10.1016/j.ultramic.2018.09.016

A new precise positioning method for piezoelectric scanner of AFM

Ultramicroscopy. 2019 Jan:196:67-73. doi: 10.1016/j.ultramic.2018.09.016. Epub 2018 Sep 21.

Authors

Yanyan Wang¹, Sen Wu², Linyan Xu², Yanan Zeng³

Affiliations

¹ Tianjin Key Laboratory of Information Sensing and Intelligent Control, Tianjin University of Technology and Education, 300222 Tianjin, China. Electronic address: yanyanwang@tute.edu.cn.
² State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, 300072 Tianjin, China.
³ College of Engineering and Technology, Tianjin Agricultural University, 300380 Tianjin, China.

PMID: 30290329
DOI: 10.1016/j.ultramic.2018.09.016

Abstract

Atomic Force Microscopy (AFM) plays a vital role in nanoscience and nanotechnology due to its nanoscale resolution. However, the realization of highly precise measurement for AFM is still a challenge. A main factor is the positioning accuracy of the piezoelectric scanner (PZT), affected significantly by the hysteresis of PZT. The paper reports a new dynamic polynomial fitting method modeling hysteresis to achieve the inverse model of the PZT. The inverse model is used as the feedforward input, combined with the fuzzy feedback controller proposed in our former paper, to correct the nonlinear errors induced by the hysteresis. The method is demonstrated to be effective in improving the positioning accuracy of the lateral PZT. Its accuracy can achieve 1 nm.

Keywords: AFM; Dynamic polynomial fitting; Hysteresis; Positioning accuracy.

Publication types

Research Support, Non-U.S. Gov't