Acoustic wave propagation along AlN on Bi12GeO20 structures

V I Anisimkin; E Verona; A S Kuznetsova

doi:10.1016/j.ultras.2018.08.010

Acoustic wave propagation along AlN on Bi₁₂GeO₂₀ structures

Ultrasonics. 2019 Apr:94:314-318. doi: 10.1016/j.ultras.2018.08.010. Epub 2018 Aug 17.

Authors

V I Anisimkin¹, E Verona², A S Kuznetsova³

Affiliations

¹ V.A. Kotel'nikov Institute of Radio Engineering and Electronic, Russian Academy of Sciences, Russia. Electronic address: anis@cplire.ru.
² V.A. Kotel'nikov Institute of Radio Engineering and Electronic, Russian Academy of Sciences, Russia; Institute for Photonics and Nanotechnologies, Italian National Research Council (IFN-CNR), Via Cineto Romano, 42, I-00156 Roma, Italy.
³ V.A. Kotel'nikov Institute of Radio Engineering and Electronic, Russian Academy of Sciences, Russia.

PMID: 30170739
DOI: 10.1016/j.ultras.2018.08.010

Abstract

Using Bi₁₂GeO₂₀ plate coated by AlN film, the main characteristics of the A₀, S₀, A₁, and S₁ Lamb waves are numerically calculated and compared with those of SAW in the same structure. It is shown that (i) there exist only one SAW mode for this material combination, (ii) the mode exist in a narrow range of AlN thickness, (iii) it can be excited using four different transducer configurations, (iv) the velocity and coupling constants of the mode are, respectively, higher and lower as compared with the values for the uncoated Bi₁₂GeO₂₀ substrate. On the other hand, for Lamb waves (i) there are several modes of different orders, (ii) the modes exist in a wide range of the AlN thickness, (iii) they may be excited using twelve IDT configurations, (iv) the velocities and coupling constants of the waves may be larger and smaller as compared with the values for the uncoated plate, (v) both characteristics of the modes depend on the mode order, film thickness, plate thickness, and transducer configuration, and (vi) the depth profiles of the modes are neither symmetrical nor anti-symmetrical. These properties make Lamb waves more attractive than SAW. Application of the waves and the structure for some applications are suggested.