Development of in situ optical-electrical MEMS platform for semiconductor characterization

Songhua Cai; Chenyi Gu; Yifan Wei; Min Gu; Xiaoqing Pan; Peng Wang

doi:10.1016/j.ultramic.2018.07.007

Development of in situ optical-electrical MEMS platform for semiconductor characterization

Ultramicroscopy. 2018 Nov:194:57-63. doi: 10.1016/j.ultramic.2018.07.007. Epub 2018 Jul 24.

Authors

Songhua Cai¹, Chenyi Gu¹, Yifan Wei¹, Min Gu¹, Xiaoqing Pan², Peng Wang³

Affiliations

¹ National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
² National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China; Department of Chemical Engineering and Materials Science and Department of Physics and Astronomy, University of California, Irvine, CA 92697, USA.
³ National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. Electronic address: wangpeng@nju.edu.cn.

PMID: 30092390
DOI: 10.1016/j.ultramic.2018.07.007

Abstract

In situ transmission electron microscopy (TEM) technology has become one of the fastest growing areas in TEM research in recent years. This technique allows researchers to investigate the dynamic response of materials to external stimuli inside the microscope. Optoelectronic functional semiconducting materials play an irreplaceable role in several key fields such as clean energy, communications, and pollution disposal. The ability to observe the dynamic behavior of these materials under real working conditions using advanced TEM technologies would provide an in-depth understanding of their working mechanisms, enabling further improvement of their properties. In this work, we designed a microelectromechanical-system-chip-based system to illuminate a sample inside a transmission electron microscope. This system allows simultaneous in situ optical and electrical measurements, which are crucial for optoelectronic semiconductor characterization.

Keywords: Biasing; In situ; MEMS chip; Photoelectrical; Transmission electron microscopy.

Publication types

Research Support, Non-U.S. Gov't