Ultrasound detection is one of the most-important nondestructive subsurface characterization tools for materials, the goal of which is to laterally resolve the subsurface structure with nanometer or even atomic resolution. In recent years, graphene resonators have attracted attention for their use in loudspeakers and ultrasound radios, showing their potential for realizing communication systems with air-carried ultrasound. Here, we show a graphene resonator that detects ultrasound vibrations propagating through the substrate on which it was fabricated. We ultimately achieve a resolution of ∼7 pm/[Formula: see text] in ultrasound amplitude at frequencies up to 100 MHz. Thanks to an extremely high nonlinearity in the mechanical restoring force, the resonance frequency itself can also be used for ultrasound detection. We observe a shift of 120 kHz at a resonance frequency of 65 MHz for an induced vibration amplitude of 100 pm with a resolution of 25 pm. Remarkably, the nonlinearity also explains the generally observed asymmetry in the resonance frequency tuning of the resonator when it is pulled upon with an electrostatic gate. This work puts forward a sensor design that fits onto an atomic force microscope cantilever and therefore promises direct ultrasound detection at the nanoscale for nondestructive subsurface characterization.
Keywords: Graphene; NEMS; resonator; scanning probe microscopy; ultrasound detection.