Capabilities of atomic force microscopy (AFM) for characterization of local electrical properties of materials are presented in this chapter. At the beginning the probe-sample force interactions, which are employed for detection of surface topography and materials properties, are described theoretically in their application in different AFM modes and electrical techniques. The electrical techniques, which are based on detection of electrostatic probe-sample forces, are outlined in AFM contact and oscillatory resonant modes. The basic features of the detection of surface potential and capacitance gradients are explained. The applications of these techniques are illustrated on metals, surfactant compounds, semiconductors, and different polymers. Practical recommendations on use of the AFM-based electrical methods and the related challenges are given in the last section.
Keywords: Atomic force microscopy (AFM); Dielectric permittivity; Electrical force microscopy (EFM); Kelvin force microscopy (KFM); Piezoresponse force microscopy (PFM); Surface potential.