Dielectric barrier discharge plasma treatment of modified SU-8 for biosensing applications

Jhonattan C Ramirez; Juliana N Schianti; Denio E P Souto; Lauro T Kubota; Hugo E Hernandez-Figueroa; Lucas H Gabrielli

doi:10.1364/BOE.9.002168

Dielectric barrier discharge plasma treatment of modified SU-8 for biosensing applications

Biomed Opt Express. 2018 Apr 9;9(5):2168-2175. doi: 10.1364/BOE.9.002168. eCollection 2018 May 1.

Authors

Jhonattan C Ramirez¹, Juliana N Schianti¹, Denio E P Souto², Lauro T Kubota², Hugo E Hernandez-Figueroa¹, Lucas H Gabrielli¹

Affiliations

¹ School of Electrical and Computer Engineering, University of Campinas, 13083-852 Campinas, SP, Brazil.
² National Institute of Science and Technology of Bioanalytics, University of Campinas, 13083-970 Campinas, SP, Brazil.

Abstract

In this work we demonstrate the use of a dielectric barrier discharge plasma for the treatment of SU-8. The resulting hydrophilic surface displays a 5° contact angle and (0.40 ± 0.012) nm roughness. Using this technique we also present a proof of concept of IgG and prostate specific antigen biodetection on a thin layer of SU-8 over gold via surface plasmon resonance detection.

Keywords: (120.6660) Surface measurements, roughness; (130.6010) Sensors; (160.5470) Polymers; (220.3740) Lithography; (240.6680) Surface plasmons; (350.5400) Plasmas.