Systematic-error-free wavefront measurement using an X-ray single-grating interferometer

Takato Inoue; Satoshi Matsuyama; Shogo Kawai; Hirokatsu Yumoto; Yuichi Inubushi; Taito Osaka; Ichiro Inoue; Takahisa Koyama; Kensuke Tono; Haruhiko Ohashi; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1063/1.5026440

Systematic-error-free wavefront measurement using an X-ray single-grating interferometer

Rev Sci Instrum. 2018 Apr;89(4):043106. doi: 10.1063/1.5026440.

Affiliations

¹ Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
² Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan.
³ RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan.

PMID: 29716372
DOI: 10.1063/1.5026440

Abstract

In this study, the systematic errors of an X-ray single-grating interferometer based on the Talbot effect were investigated in detail. Non-negligible systematic errors induced by an X-ray camera were identified and a method to eliminate the systematic error was proposed. Systematic-error-free measurements of the wavefront error produced by multilayer focusing mirrors with large numerical apertures were demonstrated at the SPring-8 Angstrom Compact free electron LAser. Consequently, wavefront aberration obtained with two different cameras was found to be consistent with an accuracy better than λ/12.