A compact multi-bounce attenuated total reflection (ATR) probe combined with a Fabry-Pérot filter spectrometer (FPFS) has been developed for detection of hydrogen peroxide used for oxidative gas scrubbing operating in the mid-infrared (MIR) spectral region. A novel MIR supercontinuum light source is employed to enhance the quantification capabilities of the sensor and is compared to a classical thermal emitter. An improvement of a factor of 4 in noise and approximately a factor of 3 in limit of detection is shown in this study allowing fast inline detection of aqueous hydrogen peroxide solutions around 0.1%.