Because silicon transistors are rapidly approaching their scaling limit due to short-channel effects, alternative technologies are urgently needed for next-generation electronics. Here, we demonstrate ultrathin ZnO piezotronic transistors with a ∼2 nm channel length using inner-crystal self-generated out-of-plane piezopotential as the gate voltage to control the carrier transport. This design removes the need for external gate electrodes that are challenging at nanometer scale. These ultrathin devices exhibit a strong piezotronic effect and excellent pressure-switching characteristics. By directly converting mechanical drives into electrical control signals, ultrathin piezotronic devices could be used as active nanodevices to construct the next generation of electromechanical devices for human-machine interfacing, energy harvesting, and self-powered nanosystems.
Keywords: ZnO ultrathin film; piezoelectricity; piezotronic effect; piezotronic transistor; piezotronics.