Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Tassie K Andersen; Seyoung Cook; Erika Benda; Hawoong Hong; Laurence D Marks; Dillon D Fong

doi:10.1063/1.5008369

Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Rev Sci Instrum. 2018 Mar;89(3):033905. doi: 10.1063/1.5008369.

Authors

Tassie K Andersen¹, Seyoung Cook¹, Erika Benda², Hawoong Hong², Laurence D Marks³, Dillon D Fong¹

Affiliations

¹ Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, USA.
² Advanced Photon Source, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, USA.
³ Department of Materials Science and Engineering, Northwestern University, 2220 Campus Dr., Evanston, Illinois 60208, USA.

PMID: 29604768
DOI: 10.1063/1.5008369

Abstract

A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. The high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO₃ oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.