A dual-frequency ultrasound transducer (DFUT) is usually preferred for its numerous advantageous applications, especially in biomedical imaging and sensing. However, most of DFUTs are based on the combination of fundamental and harmonic operations, or integration of multiple different single-frequency ultrasound transducers, hindering perfect beam alignment and acoustic impedance matching. A novel single-element DFUT has been proposed in this paper. A small piezoelectric membrane is used as the high-frequency ultrasound transducer, which is stacked on a large non-piezoelectric elastic membrane with a groove used as the low-frequency capacitive ultrasound transducer. Such a capacitive-piezoelectric hybrid structure is theoretically analysed in details, based on the electrostatic attraction force and converse piezoelectric effect. Both the low and high resonance frequencies are independently derived, with a maximum deviation of less than 4% from the finite element simulations. Besides, a lumped-parameter equivalent circuit model of combining both the capacitive and piezoelectric ultrasound transducers was also described. Based on our dual-frequency structure design, a high-to-low frequency ratio of about 2 to more than 20 could be achieved, with easy and independent controllability of two frequencies, and the high-frequency operation shows at least an order-of-magnitude displacement sensitivity improvement compared with the conventional harmonic operations.
Keywords: dual-frequency ultrasound transducer; equivalent circuit; finite element simulation; piezoelectric-capacitive hybrid structure; single-element.