Ferroelectric domain structure has been formed under the action of electron beam scanning in congruent lithium niobate single crystal covered by surface dielectric layer. The obtained types of the domain patterns have been considered as subsequent stages of domain structure evolution. The dependence on irradiated charge density of domain density, length, and period of domain rays and stripe domain width was used for characterization of the domain structure evolution. The threshold irradiated charge density necessary for the formation of solid stripe domain has been revealed. All obtained results have been discussed in terms of kinetic approach based on the analogy between domain structure evolution and first-order phase transition.