Electron CHanneling ORientation Determination (eCHORD): An original approach to crystalline orientation mapping

C Lafond; T Douillard; S Cazottes; P Steyer; C Langlois

doi:10.1016/j.ultramic.2017.12.019

Electron CHanneling ORientation Determination (eCHORD): An original approach to crystalline orientation mapping

Ultramicroscopy. 2018 Mar:186:146-149. doi: 10.1016/j.ultramic.2017.12.019. Epub 2017 Dec 28.

Authors

C Lafond¹, T Douillard¹, S Cazottes¹, P Steyer¹, C Langlois²

Affiliations

¹ Université de Lyon, INSA-Lyon, MATEIS CNRS UMR5510, 7 avenue Jean Capelle, Villeurbanne 69621 (France).
² Université de Lyon, INSA-Lyon, MATEIS CNRS UMR5510, 7 avenue Jean Capelle, Villeurbanne 69621 (France). Electronic address: cyril.langlois@insa-lyon.fr.

PMID: 29335223
DOI: 10.1016/j.ultramic.2017.12.019

Abstract

We present a proof-of-concept attesting the feasability to obtain orientation maps of polycrystalline materials within a conventional Scanning Electron Microscope (SEM) using a standard goniometer and Back Scattered Electron (BSE) detector. The described method is based on the analysis of the contrast variation of grains due to the channeling of incident electrons on a rotating sample. On each pixel of the map, experimental intensity profiles as a function of the rotation angle are obtained and compared with simulated ones to retrieve the orientation. From first results on aluminum polycrystals, the angular resolution is estimated to be better than one degree.

Keywords: EBSD; Electron channeling; Orientation mapping; SEM.