UV light is found to trigger the decomposition of MClx or M(NO3)x (where M = Fe, Co, Ni, Cu, or Zn) to form uniform, amorphous films of metal oxides. This process does not elevate the temperature of the substrate and thus conformal films can be coated on a range of substrates, including rigid glass and flexible plastic. The formation of the oxide films were confirmed by a combination of powder X-ray diffraction, X-ray photoelectron spectroscopy, X-ray fluorescence spectroscopy, Fourier transform infrared spectroscopy and scanning electron microscopy techniques. Amorphous oxide films of iron, nickel and a combination of iron and nickel demonstrated oxygen evolution reaction electrocatalytic activities commensurate with films of the same compositions prepared by widely used electrodeposition and sputtering methods. These results illuminate a potential route to amorphous oxides at scale using simple metal precursors without vacuum or heat.