Using the tip-based continuous indentation process, arrays of three-dimensional pyramidal cavities have been successfully machined on a copper template and the structures were successfully transferred to a polydimethylsiloxane (PDMS) surface using a reverse nanoimprinting approach. The structured PDMS surface is coated with a thin Au film, and the final substrate is demonstrated as a surface-enhanced Raman spectroscopy (SERS) substrate. Rhodamine 6G (R6G) was used as a probe molecule in the present study to confirm the SERS measurements. Arrays of micro/nanostructures of different dimensions were formed by the overlap of pyramidal cavities with different adjacent distances using the tip-based continuous indentation process. The effects of the reverse nanoimprinting process and coating process on the final topography of the structures are studied. The experimental results show that the Raman intensity of the Au-film-coated PDMS substrate is influenced by the topography of the micro/nanostructures and by the thickness of the Au film. The Raman intensity of 1362 cm-1 R6G peak on the structured Au-film-coated PDMS substrate is about 8 times higher than the SERS tests on a commercial substrate (Q-SERS). A SERS enhancement factor ranging from 7.5 × 105 to 6 × 106 was achieved using the structured Au-film-coated PDMS surface, and it was demonstrated that the method proposed in this paper is reliable, replicable, homogeneous and low-cost for the fabrication of SERS substrates.
Keywords: PDMS substrate; SERS; micro/nanopyramid; nanoimprinting; rhodamine 6G.