Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Xinran Tan; Fan Zhu; Chao Wang; Yang Yu; Jian Shi; Xue Qi; Feng Yuan; Jiubin Tan

doi:10.3390/s17112672

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Sensors (Basel). 2017 Nov 19;17(11):2672. doi: 10.3390/s17112672.

Authors

Xinran Tan¹, Fan Zhu², Chao Wang³, Yang Yu⁴, Jian Shi⁵, Xue Qi⁶, Feng Yuan⁷, Jiubin Tan⁸

Affiliations

¹ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. tanxr@hit.edu.cn.
² Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. zf5016@hit.edu.cn.
³ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. Wangchao.hit@gmail.com.
⁴ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. yuyang9412@gmail.com.
⁵ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. hitshijian@gmail.com.
⁶ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. hgdqixue@gmail.com.
⁷ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. yuanf@hit.edu.cn.
⁸ Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. jbtan@hit.edu.cn.

Abstract

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG.

Keywords: Monte Carlo method; angle calibration; angle generator; angular deflection; capacitive sensor; flexure hinge.