Controlling Piezoelectric Responses in Pb(Zr0.52Ti0.48)O3 Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

Minh D Nguyen; Evert P Houwman; Huiyu Yuan; Ben J Wylie-van Eerd; Matthijn Dekkers; Gertjan Koster; Johan E Ten Elshof; Guus Rijnders

doi:10.1021/acsami.7b07428

Controlling Piezoelectric Responses in Pb(Zr_0.52Ti_0.48)O₃ Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

ACS Appl Mater Interfaces. 2017 Oct 18;9(41):35947-35957. doi: 10.1021/acsami.7b07428. Epub 2017 Oct 4.

Authors

Minh D Nguyen^{1

2

3}, Evert P Houwman¹, Huiyu Yuan¹, Ben J Wylie-van Eerd¹, Matthijn Dekkers², Gertjan Koster¹, Johan E Ten Elshof¹, Guus Rijnders¹

Affiliations

¹ MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
² Solmates B.V. , Drienerlolaan 5, 7522NB Enschede, The Netherlands.
³ International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology , No. 1 Dai Co Viet Road, Hanoi 10000, Vietnam.

Abstract

Nanosheet Ca₂Nb₃O₁₀ (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir-Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr_0.52Ti_0.48)O₃ (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d_33f). An enhanced d_33f value of 356 pm V^-1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.

Keywords: microstructure; nanosheets; piezoelectric films; ultrahigh piezoelectricity; ultralow expansion glass.