Optical and Electric Multifunctional CMOS Image Sensors for On-Chip Biosensing Applications

Takashi Tokuda; Toshihiko Noda; Kiyotaka Sasagawa; Jun Ohta

doi:10.3390/ma4010084

Optical and Electric Multifunctional CMOS Image Sensors for On-Chip Biosensing Applications

Materials (Basel). 2010 Dec 29;4(1):84-102. doi: 10.3390/ma4010084.

Authors

Takashi Tokuda^{1

2}, Toshihiko Noda³, Kiyotaka Sasagawa⁴, Jun Ohta⁵

Affiliations

¹ Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan. tokuda@ms.naist.jp.
² PRESTO, Japan Science and Technology Agency, 3-5 Sanba, Chiyoda, Tokyo, 102-0075, Japan. tokuda@ms.naist.jp.
³ Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan. t-noda@ms.naist.jp.
⁴ Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan. sasagawa@ms.naist.jp.
⁵ Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan. ohta@ms.naist.jp.

Abstract

In this review, the concept, design, performance, and a functional demonstration of multifunctional complementary metal-oxide-semiconductor (CMOS) image sensors dedicated to on-chip biosensing applications are described. We developed a sensor architecture that allows flexible configuration of a sensing pixel array consisting of optical and electric sensing pixels, and designed multifunctional CMOS image sensors that can sense light intensity and electric potential or apply a voltage to an on-chip measurement target. We describe the sensors' architecture on the basis of the type of electric measurement or imaging functionalities.

Keywords: CMOS image sensor; electric imaging; on-chip imaging.

Publication types

Review