Low-profile self-sealing sample transfer flexure box

Kevin Simon; Lukas Porz; Tushar Swamy; Yet-Ming Chiang; Alexander Slocum

doi:10.1063/1.4997952

Low-profile self-sealing sample transfer flexure box

Rev Sci Instrum. 2017 Aug;88(8):083705. doi: 10.1063/1.4997952.

Authors

Kevin Simon¹, Lukas Porz², Tushar Swamy¹, Yet-Ming Chiang², Alexander Slocum¹

Affiliations

¹ Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
² Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.

PMID: 28863648
DOI: 10.1063/1.4997952

Abstract

A flexural bearing mechanism has enabled the development of a self-sealing box for protecting air sensitive samples during transfer between glove boxes, micro-machining equipment, and microscopy equipment. The simplicity and self-actuating feature of this design makes it applicable to many devices that operate under vacuum conditions. The models used to design the flexural mechanism are presented in detail. The device has been tested in a Zeiss Merlin GEMINI II scanning electron microscope with Li₃PS₄ samples, showing effective isolation from air and corrosion prevention.