Spatial resolution and cathodoluminescence intensity dependence on acceleration voltage in electron beam excitation assisted optical microscopy using Y2O3:Eu3+ film

Yu Masuda; Masashi Kamiya; Atsushi Sugita; Wataru Inami; Yoshimasa Kawata; Hiroko Kominami; Yoichiro Nakanishi

doi:10.1016/j.ultramic.2017.07.010

Spatial resolution and cathodoluminescence intensity dependence on acceleration voltage in electron beam excitation assisted optical microscopy using Y₂O₃:Eu³⁺ film

Ultramicroscopy. 2017 Nov:182:212-215. doi: 10.1016/j.ultramic.2017.07.010. Epub 2017 Jul 13.

Authors

Yu Masuda¹, Masashi Kamiya², Atsushi Sugita², Wataru Inami³, Yoshimasa Kawata⁴, Hiroko Kominami⁵, Yoichiro Nakanishi⁵

Affiliations

¹ Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 4328561, Japan.
² Department of Materials Science, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 4328561, Japan.
³ CREST, Japan Science and Technology Agency, Japan; Research Institute of Electrics, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 4328561, Japan. Electronic address: inami.wataru@shizuoka.ac.jp.
⁴ CREST, Japan Science and Technology Agency, Japan; Research Institute of Electrics, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 4328561, Japan.
⁵ Research Institute of Electrics, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 4328561, Japan.

PMID: 28715668
DOI: 10.1016/j.ultramic.2017.07.010

Abstract

This study presents relationship between acceleration voltage and spatial resolution of electron-beam assisted (EXA) optical microscope. The nanometric illumination light sources of the present EXA microscope was red-emitting cathodoluminescence (CL) in the Y₂O₃:Eu³⁺ thin film excited by focused electron beam. Our experimental results demonstrated that the spatial resolutions of the EXA microscope were higher as the acceleration voltage was higher. We managed to make images of the scattered gold particles with approximately 90 nm-resolutions at the voltages higher than 20 kV. The dependence of the spatial resolution on the acceleration voltage was explained by the distribution of simulated electron scattering trajectories in the luminescent thin film.

Publication types

Research Support, Non-U.S. Gov't