Position error correction of large-aperture aspherical in-position measurement

Xiang Wei; Bing Li; Lei Chen; Lin Sun; Meiting Xin; Bingcai Liu

doi:10.1063/1.4984123

Position error correction of large-aperture aspherical in-position measurement

Rev Sci Instrum. 2017 Jun;88(6):065101. doi: 10.1063/1.4984123.

Authors

Xiang Wei¹, Bing Li¹, Lei Chen¹, Lin Sun¹, Meiting Xin¹, Bingcai Liu²

Affiliations

¹ State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
² Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi'an Technological University, Xi'an 710021, Shaanxi, China.

PMID: 28667946
DOI: 10.1063/1.4984123

Abstract

An improved mathematical model of aspherical in-position measurement calibration is proposed in this paper, including hardware and software methods. The hardware method is used in rough calibration, but it is not precise enough. Then, the software method is chosen to further reduce the error. Simulation experiments are performed to demonstrate the effectiveness of this improved approach. Lastly, the model is verified through the testing of a concave aspheric surface. The experiment results show that the measurement errors of mirror after data processing can be reduced about 2 μm.