Super high sensitive plate acoustic wave humidity sensor based on graphene oxide film

Iren E Kuznetsova; Vladimir I Anisimkin; Sergei P Gubin; Sergei V Tkachev; Vladimir V Kolesov; Vadim V Kashin; Boris D Zaitsev; Alexander M Shikhabudinov; Enrico Verona; Shaorong Sun

doi:10.1016/j.ultras.2017.06.019

Super high sensitive plate acoustic wave humidity sensor based on graphene oxide film

Ultrasonics. 2017 Nov:81:135-139. doi: 10.1016/j.ultras.2017.06.019. Epub 2017 Jun 23.

Affiliations

¹ Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia; Management School, University of Shanghai for Science and Technology, 516 Jungong Road, Shanghai 200093, PR China. Electronic address: kuziren@yandex.ru.
² Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia.
³ Kurnakov Institute of General and Inorganic Chemistry of RAS, Moscow 119991, Russia. Electronic address: gubin@igic.ras.ru.
⁴ Kurnakov Institute of General and Inorganic Chemistry of RAS, Moscow 119991, Russia.
⁵ Kotelnikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia. Electronic address: zai-boris@yandex.ru.
⁶ Kotelnikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia.
⁷ Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia; Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy. Electronic address: veronaenrico@gmail.com.
⁸ Management School, University of Shanghai for Science and Technology, 516 Jungong Road, Shanghai 200093, PR China. Electronic address: 1421236150@qq.com.

PMID: 28666106
DOI: 10.1016/j.ultras.2017.06.019

Abstract

The changes of density and elastic modules due to water vapor adsorption are measured for graphene oxide film at room temperature. Dominant mechanism for acoustic wave humidity sensing by the film is shown to be related with variation of its electric conductivity. Basing on the data, super high sensitive humidity sensor employing high-order Lamb wave with large coupling constant, standard lithium niobate plate, and graphene oxide sorbent film is developed. The minimal detectable level of the sensor is as low 0.03% RH, response times are 60/120s, and reproducibility is ±2.5%. The sensor is completely selective towards H₂, CO, CH₄, NO, O₂.

Publication types

Research Support, Non-U.S. Gov't