The Monte Carlo program PENEPMA performs simulations of X-ray emission from samples bombarded with both electron and photon beams. It is based on the general-purpose Monte Carlo simulation package PENELOPE, an elaborate system for the simulation of coupled electron-photon transport in arbitrary materials, and on the geometry subroutine package PENGEOM, which tracks particles through complex material structures defined by quadric surfaces. After a brief description of the interaction models implemented in the simulation subroutines and of the structure and operation of PENEPMA, we provide an overview of the capabilities of the program along with several examples of its application to the modeling of electron probe microanalysis measurements.
Keywords: Monte Carlo simulation; PENELOPE; X-ray spectra; electron probe microanalysis.