3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

Beilstein J Nanotechnol. 2017 Apr 7:8:801-812. doi: 10.3762/bjnano.8.83. eCollection 2017.

Abstract

We investigate the growth, purity, grain structure/morphology, and electrical resistivity of 3D platinum nanowires synthesized via electron beam induced deposition with and without an in situ pulsed laser assist process which photothermally couples to the growing Pt-C deposits. Notably, we demonstrate: 1) higher platinum concentration and a coalescence of the otherwise Pt-C nanogranular material, 2) a slight enhancement in the deposit resolution and 3) a 100-fold improvement in the conductivity of suspended nanowires grown with the in situ photothermal assist process, while retaining a high degree of shape fidelity.

Keywords: 3D printing; additive manufacturing; beam induced processing; direct-write; electron beam induced deposition; microscopy; nanofabrication; pulsed laser; purification; rapid prototyping.