Vapor deposition routes to conformal polymer thin films

Priya Moni; Ahmed Al-Obeidi; Karen K Gleason

doi:10.3762/bjnano.8.76

Vapor deposition routes to conformal polymer thin films

Beilstein J Nanotechnol. 2017 Mar 28:8:723-735. doi: 10.3762/bjnano.8.76. eCollection 2017.

Authors

Priya Moni¹, Ahmed Al-Obeidi¹, Karen K Gleason²

Affiliations

¹ Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139, USA.
² Department of Chemical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139, USA.

Abstract

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

Keywords: conformal; polymers; thin films; vapor deposition.

Publication types

Review