Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry

Abstract

We describe a methodology to obtain three-dimensional models of engineered surfaces using scanning electron microscopy and multi-view photogrammetry (3DSEM). For the reconstruction of the 3D models of the surfaces we used freeware available in the cloud. The method was applied to study the surface roughness of metallic samples patterned with parallel grooves by means of laser. The results are compared with measurements obtained using stylus profilometry (PR) and SEM stereo-photogrammetry (SP). The application of 3DSEM is more time demanding than PR or SP, but it provides a more accurate representation of the surfaces. The results obtained with the three techniques are compared by investigating the influence of sampling step on roughness parameters.

Keywords: 3DSEM; Patterned surfaces; Photogrammetry; Profilometry; Roughness; SEM metrology; Stereo-photogrammetry.