Programmable Bidirectional Folding of Metallic Thin Films for 3D Chiral Optical Antennas

Yifei Mao; Yun Zheng; Can Li; Lin Guo; Yini Pan; Rui Zhu; Jun Xu; Weihua Zhang; Wengang Wu

doi:10.1002/adma.201606482

Programmable Bidirectional Folding of Metallic Thin Films for 3D Chiral Optical Antennas

Adv Mater. 2017 May;29(19). doi: 10.1002/adma.201606482. Epub 2017 Mar 10.

Authors

Yifei Mao¹, Yun Zheng², Can Li¹, Lin Guo³, Yini Pan¹, Rui Zhu⁴, Jun Xu⁴, Weihua Zhang², Wengang Wu^{1

5}

Affiliations

¹ National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China.
² College of Engineering and Applied Sciences, National Laboratory of Solid State Microstructures, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, Jiangsu, 210093, P. R. China.
³ Key Laboratory of Broadband Wireless Communication and Sensor Network Technology of Ministry of Education, College of Internet of Things, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu, 210096, P. R. China.
⁴ Electron Microscopy Laboratory, Peking University, Beijing, 100871, P. R. China.
⁵ Innovation Center for MicroNanoelectronics and Integrated System, Beijing, 100871, P. R. China.

PMID: 28294438
DOI: 10.1002/adma.201606482

Abstract

3D structures with characteristic lengths ranging from nanometer to micrometer scale often exhibit extraordinary optical properties, and have been becoming an extensively explored field for building new generation nanophotonic devices. Albeit a few methods have been developed for fabricating 3D optical structures, constructing 3D structures with nanometer accuracy, diversified materials, and perfect morphology is an extremely challenging task. This study presents a general 3D nanofabrication technique, the focused ion beam stress induced deformation process, which allows a programmable and accurate bidirectional folding (-70°-+90°) of various metal and dielectric thin films. Using this method, 3D helical optical antennas with different handedness, improved surface smoothness, and tunable geometries are fabricated, and the strong optical rotation effects of single helical antennas are demonstrated.

Keywords: chiral optical antennas; focused ion beam; nanofabrication; optical rotation; programmable folding.