Low vibration laboratory with a single-stage vibration isolation for microscopy applications

Bert Voigtländer; Peter Coenen; Vasily Cherepanov; Peter Borgens; Thomas Duden; F Stefan Tautz

doi:10.1063/1.4975832

Low vibration laboratory with a single-stage vibration isolation for microscopy applications

Rev Sci Instrum. 2017 Feb;88(2):023703. doi: 10.1063/1.4975832.

Authors

Bert Voigtländer¹, Peter Coenen¹, Vasily Cherepanov¹, Peter Borgens¹, Thomas Duden², F Stefan Tautz¹

Affiliations

¹ Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
² Konstruktionsbüro Duden, Borgsenallee 35, 33649 Bielefeld, Germany.

PMID: 28249528
DOI: 10.1063/1.4975832

Abstract

The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.