Bolometer sensor is a good candidate for THz imaging due to its compact system, low cost, and wideband operation. Based on infrared microbolometer structures, two kinds of antenna-coupled microbridge structures are proposed with different spiral antennas: spiral antenna on support layer and spiral antenna with extended legs. Aiming at applications in detection and imaging, simulations are carried out mainly for optimized absorption at 2.52 THz, which is the radiation frequency of far-infrared CO2 lasers. The effects of rotation angle, line width, and spacing of the spiral antenna on THz wave absorption of microbridge structures are discussed. Spiral antenna, with extended legs, is a good solution for high absorption rate at low absorption frequency and can be used as electrode lead simultaneously for simplified manufacturing process. A spiral antenna-coupled microbridge structure with an absorption rate of more than 75% at 2.52 THz is achieved by optimizing the structure parameters. This research demonstrates the use of different spiral antennas for enhanced and tunable THz absorption of microbridge structures and provides an effective way to fabricate THz microbolometer detectors with great potential in the application of real-time THz imaging.
Keywords: Absorption; Design; Microbolometer; Spiral antenna; THz.