Flexible pressure sensors are essential components of electronic skins for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics, robotic skins, and prosthetic limbs. Here we report a new kind of flexible pressure sensor. The sensors are capacitive, and composed of two Ag wrinkled electrodes separated by a carbon nanotubes (CNTs)/polydimethylsiloxane (PDMS) composite deformable dielectric layer. Ag wrinkled electrodes were formed by vacuum deposition on top of pre-strained and relaxed PDMS substrates which were treated using an O₂ plasma, a surface functionalization process, and a magnetron sputtering process. Ultimately, the developed sensor exhibits a maximum sensitivity of 19.80% kPa-1 to capacitance, great durability over 500 cycles, and rapid mechanical responses (<200 ms). We also demonstrate that our sensor can be used to effectively detect the location and distribution of finger pressure.
Keywords: Ag wrinkled electrodes; carbon nanotube; flexible sensor; pressure sensor.