Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

Wen Qiao; Wenbin Huang; Yanhua Liu; Xiangmin Li; Lin-Sen Chen; Jian-Xin Tang

doi:10.1002/adma.201601801

Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

Adv Mater. 2016 Dec;28(47):10353-10380. doi: 10.1002/adma.201601801. Epub 2016 Nov 7.

Authors

Wen Qiao^{1

2}, Wenbin Huang^{1

2}, Yanhua Liu^{1

2}, Xiangmin Li³, Lin-Sen Chen^{1

2}, Jian-Xin Tang^{1

4}

Affiliations

¹ Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.
² College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
³ Micro-/Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shanxi, 710049, China.
⁴ Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou, 215123, China.

PMID: 27976840
DOI: 10.1002/adma.201601801

Abstract

Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light-emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted.

Keywords: flexible nanomanufacturing; light management; organic optoelectronics; photonic structures.