A novel PFIB sample preparation protocol for correlative 3D X-ray CNT and FIB-TOF-SIMS tomography

Agnieszka Priebe; Guillaume Audoit; Jean-Paul Barnes

doi:10.1016/j.ultramic.2016.11.010

A novel PFIB sample preparation protocol for correlative 3D X-ray CNT and FIB-TOF-SIMS tomography

Ultramicroscopy. 2017 Feb:173:10-13. doi: 10.1016/j.ultramic.2016.11.010. Epub 2016 Nov 19.

Authors

Agnieszka Priebe¹, Guillaume Audoit², Jean-Paul Barnes²

Affiliations

¹ Univ. Grenoble Alpes, F-38000 Grenoble, France; CEA, LETI, MINATEC Campus, F-38054 Grenoble, France. Electronic address: agnieszka.priebe@gmail.com.
² Univ. Grenoble Alpes, F-38000 Grenoble, France; CEA, LETI, MINATEC Campus, F-38054 Grenoble, France.

PMID: 27898297
DOI: 10.1016/j.ultramic.2016.11.010

Abstract

We present a novel sample preparation method that allows correlative 3D X-ray Computed Nano-Tomography (CNT) and Focused Ion Beam Time-Of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS) tomography to be performed on the same sample. In addition, our invention ensures that samples stay unmodified structurally and chemically between the subsequent experiments. The main principle is based on modifying the topography of the X-ray CNT experimental setup before FIB-TOF-SIMS measurements by incorporating a square washer around the sample. This affects the distribution of extraction field lines and therefore influences the trajectories of secondary ions that are now guided more efficiently towards the detector. As the result, secondary ion detection is significantly improved and higher, i.e. statistically better, signals are obtained.

Keywords: 3D correlative tomography; FIB-TOF-SIMS; Focused ion beam; Ion detection; Sample preparation; X-ray nano-tomography.