Mass transport of oxygen through an ionomer contained within the cathode catalyst layer in an anion exchange membrane fuel cell is critical for a functioning fuel cell, yet is relatively unexplored. Moreover, because water is a reactant in the oxygen reduction reaction (ORR) in alkaline media, an adequate supply of water is required. In this work, ORR mass transport behavior is reported for methylated hexamethyl-p-terphenyl polymethylbenzimidazoles (HMT-PMBI), charge balanced by hydroxide ions (IEC from 2.1 to 2.5 mequiv/g), and commercial Fumatec FAA-3 membranes. Electrochemical mass transport parameters are determined by potential step chronoamperometry using a Pt microdisk solid-state electrochemical cell, in air at 60 °C, with relative humidity controlled between 70% and 98%. The oxygen diffusion coefficient (DbO2), oxygen concentration (cbO2), and oxygen permeability (DbO2·cbO2) were obtained by nonlinear curve fitting of the current transients using the Shoup-Szabo equation. Mass transport parameters are correlated to water content of the ionomer membrane. It is found that the oxygen diffusion coefficients decreased by 2 orders of magnitude upon reducing the water content of the ionomer membrane by lowering the relative humidity. The limitation of the Shoup-Szabo equation for extracting ORR mass transport parameters using thin ionomer films was evaluated by numerical modeling of the current transients, which revealed that a significant discrepancy (up to 29% under present conditions) was evident for highly hydrated membranes for which the oxygen diffusion coefficient was largest, and in which the oxygen depletion region reached the ionomer/gas interface during the chronoamperometric analysis.