Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips

Yanqiang Zhao; Songmei Yuan; Xiangcheng Chu; Shuning Gao; Zuojin Zhong; Cong Zhu

doi:10.1063/1.4963662

Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips

Rev Sci Instrum. 2016 Sep;87(9):095108. doi: 10.1063/1.4963662.

Authors

Yanqiang Zhao¹, Songmei Yuan¹, Xiangcheng Chu², Shuning Gao², Zuojin Zhong², Cong Zhu¹

Affiliations

¹ School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.
² State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China.

PMID: 27782574
DOI: 10.1063/1.4963662

Abstract

In this study, an oblate-type ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips was proposed and experimentally researched. The micro-motor works based on the standing-wave principle and has a higher rotary speed than the traditional standing-wave one in principle, reaching a rotary speed of 2100 r/min in this study at the voltage of 20 V_p-p. When the micro-motor rotates, single phase alternating current is required, namely, V=Asinωt, and exchanging the signal wire and ground wire will not change the rotary direction of the motor, which reinforces the safety and the compaction of this motor. The ratio of the maximum displacement value of the speed feeding direction and the preload direction is approximately 4, showing a characteristic of high speed and low ability to load.