Ultrahigh rates realized by ALD-made TiN. The symmetric full-cell supercapacitors deliver a typical capacitance of 20.7 F cm-3 at a scan rate of 1 V s-1, and retain 4.3 F cm-3 at high rate of 100 V s-1. The devices can be charged and discharged for 20 000 cycles with negligible capacitance loss and with an ultralow self-discharge current (≈1 μA).
Keywords: self‐discharge; supercapacitors; titanium nitride; ultrafast charging; ultrahigh capability.