Ultrasensitive Pressure Detection of Few-Layer MoS2

Feifan Yu; Qianwen Liu; Xin Gan; Mingxiang Hu; Tianyi Zhang; Cheng Li; Feiyu Kang; Mauricio Terrones; Ruitao Lv

doi:10.1002/adma.201603266

Ultrasensitive Pressure Detection of Few-Layer MoS₂

Adv Mater. 2017 Jan;29(4). doi: 10.1002/adma.201603266. Epub 2016 Oct 17.

Authors

Feifan Yu¹, Qianwen Liu², Xin Gan¹, Mingxiang Hu¹, Tianyi Zhang³, Cheng Li², Feiyu Kang¹, Mauricio Terrones^{3

4

5}, Ruitao Lv¹

Affiliations

¹ Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
² School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China.
³ Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA, 16802, USA.
⁴ Department of Chemistry, Department of Physics and Center for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, PA, 16802, USA.
⁵ Institute of Carbon Science and Technology, Shinshu University, Wakasato 4-17-1, Nagano, 380-853, Japan.

PMID: 27748535
DOI: 10.1002/adma.201603266

Abstract

Ultrasensitive pressure sensors are constructed with few-layer MoS₂ films. As-designed Fabry-Perot (F-P) sensors exhibit nearly synchronous pressure-deflection responses with a very high sensitivity (89.3 nm Pa^-1 ), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F-P sensor may open up new avenues for 2D materials in biomedical and environmental applications.

Keywords: 2D materials; F-P sensor; MoS2; pressure detection.