Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing

Opt Express. 2016 Sep 5;24(18):20855-61. doi: 10.1364/OE.24.020855.

Abstract

We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 μm is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy.