Atomic layer deposition (ALD) technology is introduced to fabricate a high sensitivity refractometer based on an adiabatic tapered optical fiber. Different thicknesses of titanium dioxide (TiO₂) nanofilm were coated around the tapered fiber precisely and uniformly under different deposition cycles. Attributed to the higher refractive index of the TiO₂ nanofilm compared to that of silica, an asymmetric Fabry-Perot (F-P) resonator could be constructed along the fiber taper. The central wavelength of the F-P resonator could be controlled by adjusting the thickness of the TiO₂ nanofilm. Such a F-P resonator is sensitive to changes in the surrounding refractive index (SRI), which is utilized to realize a high sensitivity refractometer. The refractometer developed by depositing 50.9-nm-thickness TiO₂ on the tapered fiber shows SRI sensitivity as high as 7096 nm/RIU in the SRI range of 1.3373-1.3500. Due to TiO₂'s advantages of high refractive index, lack of toxicity, and good biocompatibility, this refractometer is expected to have wide applications in the biochemical sensing field.
Keywords: adiabatic tapered optical fiber; atomic layer deposition; refractometer; titanium dioxide nanofilm.